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Bayesian Multiscale In Situ Process Control for Nanomanufacturing

Daniel J. Epstein Department of Industrial and Systems Engineering Seminar:"Bayesian Multiscale In Situ Process Control for Nanomanufacturing"Dr. Qiang HuangAssistant Professor, Department of Industrial and Management Systems Engineering, University of South Florida. Tampa, FL 33620, http://www.eng.usf.edu/~huangqABSTRACT: The fast-developing nanotechnology needs breakthrough innovations in manufacturing to expedite its transfer from laboratories to industry applications at lower cost. Yet much less research and education initiatives have been undertaken in nanomanufacturing to duplicate the success of transforming quality and productivity performance of traditional manufacturing. Standard statistical quality control (SQC) methods are essential to efficient nanomanufacturing. But SQC faces new challenges of scale effects in nanomanufacturing. Particularly, process variables affecting nanostructure growth are manipulated at macroscopic length/time scales. The quality characteristics of nanostructures (e.g., nanowire diameters) would better be characterized at nanoscale. Relating macroscale process variables to nanoscale quality characteristics requires novel multiscale model integration for in situ process control. Process control in nanomanufacturing therefore demands a new paradigm for effective modeling, process change detection, and process adjustment. Using nanowire growth process as an example, this talk will present a Bayesian multiscale modeling and control scheme for in situ process control in nanomanufacturing. Other research activities in the speaker's Nanomanufacturing Quality Control Laboratory (Nano-QCLab) will be introduced too. MONDAY, APRIL 28, 2008, GERONTOLOGY BUILDING (GER) ROOM 309, 2:00 – 3:00 PM

Location: Ethel Percy Andrus Gerontology Center (GER) - 309

Audiences: Everyone Is Invited

Contact: Georgia Lum