Events Calendar

Astani Civil and Environmental Engineering Seminar

Speaker: Lu-Maan Chang, Professor Emeritus, Purdue University , Professor and Director, High-Tech Facility Research Center, Department of Civil Engineering, National Taiwan University

Talk Title: HIGH-TECH FACILITY ENGINEERING IN NT ERA

Abstract:
Key Words: Cleanroom, Construction, Green Building, High-Tech, Microelectronics, Nanotechnology, Semiconductor, Vibration


Nanotechnology (NT) will not only improve the technology for understanding the foundation of matter at the atomic, molecular, and supermolecular levels but will have as profound an impact on our economy, quality of life, and education as the information technology (IT) has had in the last two decades.

To cope with the new challenges ahead, many academic institutes and industrial companies around the world have invested heavily in pursuing Nano-R&D and Nano-Manufacturing (Nano-R&D&M) in recent years. Predictably, the demand for high-tech facilities and the corresponding skillful engineers will be strong and inevitable. Presently, there is no university in Asia offering high-tech facility engineering program specifically for Nano-R&D&M. To facilitate the advancement of Nano-R&D&M, and to meet the potential demand of the engineers, the Civil Engineering Department of National Taiwan University initiated a High-Tech Facility Research Center in fall 2006 and is offering a High-Tech Facility Design course in spring 2007.

This paper will begin with the introduction of NT and its impact on facility design and construction following by the discussion of the sensitivity in micro-vibration of high performance nano-scopes. Since most of the Nano-R&D&M processes must be done in a stringently controlled cleanroom, without a proper cleanroom, the Nano-R&D&M can neither be performed well nor advanced further. Therefore, the paper will then focus on the fundamentals in cleanroom design. Finally, the NTU High-Tech Research Center and the High-Tech Facility Design course will be briefly presented.

This paper was published in CECI engineering technology, CECI, Taipei, Taiwan, April 2007, Vol.74, pp.22-37

Location: Kaprielian Hall (KAP) - 209 Conference Room

Audiences: Everyone Is Invited

Contact: Evangeline Reyes