Events Calendar

EE-EP Seminar

Speaker: Mina Rais-Zadeh, University of Michigan

Talk Title: Resonant MEMS for Timing and Integrated Sensing

Abstract: Invention of transistors and development of microelectronics unleashed a revolution in computing and communication. This revolution was mostly brought about by the fact that transistors and ICs could be miniaturized at an unprecedented level. Following the same trend, micro-electromechanical systems (MEMS), have been extensively employed for sensing and in mobile applications. In the next few decades, the MEMS field is expected to grow even more rapidly and find wider applications. A vast majority of systems used for sensing, communications, and signal processing rely on accurate clocking signals that are generated by micro-resonators. In this talk, I will go over the design of micro-resonators and resonant sensors, and discuss the application of these devices in timing and integrated sensing. I will explain the need for high quality factor and discuss the physical phenomena that limit the performance and scaling of resonant MEMS.


Biography: Professor Mina Rais-Zadeh received the B.S. degree in electrical engineering from Sharif University of Technology and M.S. and Ph.D. degrees both in Electrical and Computer Engineering from Georgia Institute of Technology in 2005 and 2008, respectively. From August 2008 to 2009, she was a Postdoctoral Research Fellow with the Integrated MEMS Group, Georgia Institute of Technology. Since January 2009, she has been with the University of Michigan, Ann Arbor, where she is currently an Assistant Professor in the Department of Electrical Engineering and Computer Science. Mina is the recipient of the NSF CAREER Award (2011), IEEE Electron Device Society Early Career Award (2011), NASA Early Career Faculty Award (2012), and the Crosby Research Award from the University of Michigan (2013). She was the finalist in student paper competitions at the SiRF (2007) and IMS (2011) conferences. She is the chairperson of the Display, Sensors and MEMS (DSM) sub-committee at the 2013 IEEE International Electron Devices Meeting (IEDM) and a senior member of IEEE. She has served as a member of the technical program committee of IEEE IEDM, IEEE Sensors Conference, and the Hilton Head workshop. Her research interests include RF MEMS, passive micromachined devices for communication applications, resonant micromechanical devices, gallium nitride MEMS, and micro/nano fabrication process development.

Host: EE-Electrophysics

Location: Ronald Tutor Hall of Engineering (RTH) - 324

Audiences: Everyone Is Invited

Contact: Marilyn Poplawski